Partner Call open until: March 27, 2023

Start of the project: Q2 2023


The project aims at development of next generation of MEMS based piezoelectric microspeakers, with a focus on the development of novel piezoelectric thin film wafers employing sputter deposition.

Project objective:

  • Development of polycrystalline and epitaxial PZT thin films on 200 mm Si wafers
  • Development of high-quality piezoelectric PZT multilayers
  • Characterize and validate the fabricated piezoMEMS microspeakers


The main challenges and topics of investigation are:

  • Development of appropriate seed and electrode layers for enabling epitaxial PZT layers on 200 mm wafers
  • Development of novel processing and deposition techniques for multilayer PZT thin films on 200 mm wafers
  • Microfabrication process development for piezoMEMS microspeakers

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