The project aims at development of next generation of MEMS based piezoelectric microspeakers, with a focus on the development of novel piezoelectric thin film wafers employing sputter deposition.
EPIPZT
Partner Call open until: March 27, 2023
Start of the project: Q2 2023
Project objective:
- Development of polycrystalline and epitaxial PZT thin films on 200 mm Si wafers
- Development of high-quality piezoelectric PZT multilayers
- Characterize and validate the fabricated piezoMEMS microspeakers
The main challenges and topics of investigation are:
- Development of appropriate seed and electrode layers for enabling epitaxial PZT layers on 200 mm wafers
- Development of novel processing and deposition techniques for multilayer PZT thin films on 200 mm wafers
- Microfabrication process development for piezoMEMS microspeakers
