AI FOR CLEANROOM

Partner Call open until: November 30, 2025

Project Start: Q1 2026

Objectives

Leverage latest AI-developments inside the cleanroom to build up a better understanding of limitations and the context sensitivity of processes, make data accessible for reasoning and prediction, and work towards fully automatically designed flows.

To enable further automation benefits, we will work on

  • Better understanding of available data (e.g., of machines) by fusing multiple data sources (incl. experts know-how)
  • Improved models for tools that know about production context
  • Automatizing creation and update of processes / flows

through adoption and extension of state-of-the art reasoning techniques (hybrid AI, PINNs, federated learning) to the cleanroom setting.

Expected results

  • Improved performance prediction of tools considering better insight into process/flow
  • Unified / fused data lake for fab data (incl. experts)
  • First prototypical implementation of automated flow construction based on established recipes

Are you interested in this project?

Contact us

Your contact person:

Heimo Müller
Business Development Sensor Systems

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