SAL MicroFab

Welcome to SAL MicroFab — the largest and most advanced research cleanroom in Austria, where groundbreaking ideas in micro- and nanotechnology become real-world solutions. We accelerate innovations from lab to market, empowering industries such as automotive, healthcare, and communications through collaborative R&D and agile co-development. Innovation starts here.

Cleanroom Infrastructure & Capabilities

Located at the High-Tech Campus Villach, our 1,400 m² SAL MicroFab is purpose-built for research, prototyping, and small-scale production. Consisting of two cleanrooms, the SAL MicroFab is certified according to the ISO 14644:2015 standard. Our cleanroom area specializes in micro(opto)electromechanical systems (M(O)EMS) and next-generation wafer-level technologies, offering everything needed to go from concept, design to component.

Cleanroom I – Research & Prototyping

This cleanroom is designed for research and development of wafers up to 200 mm. Ideal for early-stage research and proof-of-concept development. We currently offer the following:

  • Wet and dry etching
  • Thin-film Deposition
  • Lithography
  • Rapid Thermal Processing
  • Advanced metrology

Cleanroom II – Pilot Production & Technology Transfer

This cleanroom is currently in the ramp-up phase but has the goal to bridge the gap between research and scalable manufacturing, equipped for semi-automated batch processing, making it ideal for small series production, pilot lines and industry-ready innovation. We currently offer the following:

  • Front-end and back-end fabrication
  • M(O)EMS device prototyping
  • RF filter production
  • Integrated photonics
  • Heterogeneous integration
  • Advanced wafer-level packaging

Contact

Do you have any questions or would you like to know more about our SAL MicroFab?

Please contact us!

Lisa Kainz, MA

Manager Busi­ness Deve­lop­ment Micro­sys­tems

E-Mail

Aya Cohen, MAS

Head of SAL MicroFab

E-Mail

Member Area
Login