The NLD-5700 introduces ULVAC’s Neutral Loop Discharge plasma technology, enabling highly stable and precise dry etching processes tailored for advanced photonics applications.
The system offers several distinct technological advantages:
- High-density, low-electron-temperature plasma for stable and controlled fine-feature processing
- Excellent within-wafer uniformity on 8-inch wafers, adjustable via Neutral Loop radius
- High etch rates, particularly at low pressures (0.1–1 Pa)
- High-aspect-ratio etching capability, enabling vertical structures with near-vertical sidewalls
Expanding Process Capabilities for Industry
With the installation of the NLD-5700, SAL significantly strengthens its plasma etching portfolio of TFLN and offers industrial partners access to a technology platform not yet available elsewhere in Europe.
The system is attractive for companies developing next-generation integrated photonic components, RF structures, and advanced sensor technologies where precision, repeatability, and vertical profile control are critical. Industrial partners can perform feasibility studies, optimize processes, and validate complex device architectures within SAL’s state-of-the-art cleanroom environment.
“With the first NLD-5700 system in Europe, we are significantly expanding our plasma etching capabilities for next generation of photonics and quantum applications,” says Mohssen Moridi, Senior Director at SAL. “The system provides our industrial partners with a powerful platform for next-generation device development.”
“The successful start of full operation of the NLD-5700 in Europe is a milestone we are truly proud of,” said Harunori Iwai, Executive Officer, Special Assignment, Semiconductor & Electronics Domain at ULVAC. “ULVAC will continue to deepen its partnership with SAL and work together to drive the growth of photonics and MEMS technologies across the European market. Through ongoing innovation, we aim to contribute to the sustainable development of Europe’s high-tech industries.”
With the NLD-5700 now fully operational, SAL further strengthens its role as a European competence hub for advanced MEMS and optical processing — bridging cutting-edge plasma technology with real industrial application need.
Contact
Lisa Kainz, MA
Business Development Microsystems
